Particle Counters

Airborne Particle Counters

For gas


Particle Sensor

Ideally suited for cleanliness control of specialgas supply systems

  • Enables inline measurement of semiconductor special materialgases


Optical system Light-scattering method
Light source Laser diode (wavelength: 830nm, rated output 200mW)
Measurement size range 5 channels: ≥0.1µm, ≥0.15µm, ≥0.2µm, ≥0.3µm, ≥0.6µm
Flow rate 100mL/min
Maximum particle number concentration 30,000 particles/L (coincidence loss 5%)
Power requirements 100V to 240V AC, 40VA (including external power requirement KZ-50(accessory))
Dimensions Approx. 135 (H) x 280 (W) x 150 (D) mm
Weight Approx. 6.5kg
Minimum detectable particle size 0.1μm