Particle Counter

Liquid-borne Particle Counters

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For measuring batch samples

KS-41B

Particle Sensor、For resist

Measures 0.1m Particles in Photoresist, SOG and other solutions

  • Can be connected to the multiple monitoring system

Specification

Optical system Light-scattering method
Light source Diode pumped solid state laser (wavelength: 532nm, rated output 500mW)
Materials of parts exposed to sample fluid Synthetic quartz, PFA
Measurement size range 5 channels (Factory default): ≥0.1µm, ≥0.15µm, ≥0.2µm, ≥0.3µm, ≥0.5µm
Setting range 0.1µm to 0.5µm
Flow rate 5mL/min
Maximum particle number concentration 9,600 particles/mL (coincidence loss 10%)
Power requirements DC12V (Supplied by KE-40B1)
Dimensions Approx. 164 (H) x 464 (W) x 305 (D) mm (excl. protruding parts)
Weight Approx. 12.5kg

KS-41A

Particle Sensor、For resist

Ideal for Monitoring 0.15m Particles in Photoresist, SOG, and Other Solutions

  • Integrated leak sensor with alarm output
  • User selectable channels within measurement range (using KE-40B1 function)

Specification

Optical system Light-scattering method
Light source Laser diode (wavelength: 830nm, rated output 200mW)
Materials of parts exposed to sample fluid Synthetic quartz, PFA
Measurement size range 4 channels (Factory default): ≥0.15µm, ≥0.2µm, ≥0.3µm, ≥0.5µm
Setting range 0.15µm to 0.5µm
Flow rate 10mL/min
Maximum particle number concentration 1,200 particles/mL (coincidence loss 5%)
Power requirements DC12V (Supplied by KE-40B1)
Dimensions Approx. 160 (H) x 300 (W) x 250 (D) mm
Weight Approx. 7.5kg

KS-19F

Particle Sensor

For Chemical HF 0.03m

  • Detects particles to 0.03mWorld's smallest detection size available for measuring particle in chemical (as of February 2014, Rion data)
  • Sapphire flow cell
  • With abundant options, it can be used for both in-line and off-line measurement

Specification

Optical system Light-scattering method
Light source Diode pumped solid state laser (wavelength: 532nm, rated output 800mW)
Materials of parts exposed to sample fluid Sapphire, PFA
Measurement size range 4 channels (Factory default):≥0.03µm, ≥0.06µm, ≥0.1µm, ≥0.13µm
Setting range 0.03µm to 0.13µm
Flow rate 10mL/min
Maximum particle number concentration 40,000 particles/mL (coincidence loss 10%)
Power requirements DC12V (Supplied by KE-40B1)
Dimensions Approx. 170 (H) x 487 (W) x 310 (D) mm
Weight Approx. 13.5kg

KS-18FX

Particle Sensor

High sensitivity allows measurement of 0.04μm particles in liquid

  • Detects particles down to 0.04μm size, at a flow rate of 10mL/min
  • User selectable particle size range up to 10 channnels within measuring range using KE-40B1
  • Integrated leak sensor with alarm output
  • Sapphire flow cell

Specification

Optical system Light-scattering method
Light source Diode pumped solid state laser (wavelength: 532nm, rated output 500mW)
Materials of parts exposed to sample fluid Sapphire, PFA
Measurement size range 4 channels (Factory default): ≥0.04µm, ≥0.08µm, ≥0.1µm, ≥0.15µm
Setting range 0.04µm to 0.15µm
Flow rate 10mL/min
Maximum particle number concentration 30,000 particles/mL (coincidence loss 10%)
Power requirements DC12V (Supplied by KE-40B1)
Dimensions Approx. 147 (H) × 272 (W) × 442 (D) mm
Weight Approx. 12kg

KS-18F

Particle Sensor

Detects particles down to 0.05m size, at a flow rate of 10mL/min

  • Counting efficiency improved to 10%
  • Sapphire flow cell
  • Particle size resolution enhancement technology employed (patented)

Specification

Optical system Light-scattering method
Light source Diode pumped solid state laser (wavelength: 532nm, rated output 500mW)
Materials of parts exposed to sample fluid Sapphire, PFA
Measurement size range 4 channels (Factory default): ≥0.05µm, ≥0.1µm, ≥0.15µm, ≥0.2µm
Setting range: 0.05µm to 0.2µm
Flow rate 10mL/min
Maximum particle number concentration 30,000 particles/mL (coincidence loss 10%)
Power requirements DC12V (Supplied by KE-40B1)
Dimensions Approx. 147 (H) x 272 (W) x 442 (D) mm
Weight Approx. 12kg

KS-42A

Particle Sensor

Detects particles down to 0.1m size, at a flow rate of 10mL/min

  • Measurements can be made using only small amounts of samples due to high counting efficiency
  • Synthetic quartz flow call

Specification

Optical system Light-scattering method
Light source Laser diode (wavelength: 830nm, rated output 200mW)
Materials of parts exposed to sample fluid Synthetic quartz, PFA
Measurement size range 5 channels (Factory default): ≥0.1µm, ≥0.15µm, ≥0.2µm, ≥0.3µm, ≥0.5µm (≥1.0µm support available as option)
Setting range: 0.1µm and 0.13µm to 0.5µm
Flow rate 10mL/min
Maximum particle number concentration 1,200 particles/mL (coincidence loss 5%)
Power requirements DC12V (Supplied by KE-40B1)
Dimensions Approx. 125 (H) x 240 (W) x 151 (D) mm
Weight Approx. 4kg

KS-42AF

Particle Sensor

Detects particles down to 0.1m size, at a flow rate of 10mL/min

  • Measurements can be made using only small amounts of samples due to high counting efficiency
  • Sapphire flow cell

Specification

Optical system Light-scattering method
Light source Laser diode (wavelength: 830nm, rated output 200mW)
Materials of parts exposed to sample fluid Sapphire, PFA
Measurement size range 5 channels (Factory default): ≥0.1µm, ≥0.15µm, ≥0.2µm, ≥0.3µm, ≥0.5µm (≥1.0µm support available as option)
Setting range 0.1µm and 0.13µm to 0.5µm
Flow rate 10mL/min
Maximum particle number concentration 1,200 particles/mL (coincidence loss 5%)
Power requirements DC12V (Supplied by KE-40B1)
Dimensions Approx. 125 (H) x 240 (W) x 151 (D) mm
Weight Approx. 4kg

KS-42B

Particle Sensor

Detects particles down to 0.2m size, at a flow rate of 10mL/min

  • Measurements can be made using only small amounts of samples due to high counting efficiency
  • Synthetic quartz flow call

Specification

Optical system Light-scattering method
Light source Laser diode (wavelength: 780nm, rated output 40mW)
Materials of parts exposed to sample fluid Synthetic quartz, PFA, PTFE
Measurement size range 5 channels (Factory default): ≥0.2µm, ≥0.3µm, ≥0.5µm, ≥1µm, ≥2µm
Setting range 0.2µm to 2µm
Flow rate 10mL/min
Maximum particle number concentration 1,200 particles/mL (coincidence loss 5%)
Power requirements DC12V (Supplied by KE-40B1)
Dimensions Approx. 125 (H) × 240 (W) × 151 (D) mm
Weight Approx. 3.2kg

KS-42BF

Particle Sensor

Detects particles down to 0.2m size, at a flow rate of 10mL/min

  • Measurements can be made using only small amounts of samples due to high counting efficiency
  • Sapphire flow cell

Specification

Optical system Light-scattering method
Light source Laser diode (wavelength: 780nm, rated output 40mW)
Materials of parts exposed to sample fluid Sapphire, PFA, PTFE
Measurement size range 5 channels (Factory default): ≥0.2µm, ≥0.3µm, ≥0.5µm, ≥1µm, ≥2µm
Setting range 0.2µm to 2µm
Flow rate 10mL/min
Maximum particle number concentration 1 200 particles/mL (coincidence loss 5%)
Power requirements DC12V (Supplied by KE-40B1)
Dimensions Approx. 125 (H) × 240 (W) × 151 (D) mm
Weight Approx. 3.2kg

KS-42C

Particle Sensor

Detects particles down to 0.5m size, at a flow rate of 10mL/min

  • Compatible with a wide range of measurement ofVarious particle sizes and types
  • Synthetic quartz flow call

Specification

Optical system Light-scattering method
Light source Laser diode (wavelength: 780nm, rated output 5mW)
Materials of parts exposed to sample fluid Synthetic quartz, PFA, PTFE
Measurement size range 7 channels (Factory default): ≥0.5µm, ≥1µm, ≥2µm, ≥3µm, ≥5µm, ≥10µm, ≥20µm
Setting range 0.5µm to 20µm
Flow rate 10mL/min
Maximum particle number concentration 1 200 particles/mL (coincidence loss 5%)
Power requirements DC12V (Supplied by KE-40B1)
Dimensions Approx. 125 (H) x 240 (W) x 151 (D) mm
Weight Approx. 3kg

KS-42D

Particle Sensor

Detects particles down to 2m size, at a flow rate of 25mL/min

  • Integrated leak sensor with alarm output
  • User selectable channels within measurement range (using KE-40B1 function)

Specification

Optical system Light obscuration method
Light source Laser diode (wavelength: 780nm, rated output 5mW)
Materials of parts exposed to sample fluid Synthetic quartz, PFA, Perfluoro
Measurement size range 8 channels (Factory default): ≥2µm, ≥3µm, ≥5µm, ≥7µm, ≥10µm, ≥25µm, ≥50µm, ≥100µm (≥150µm support available as option)
Setting range 2µm to 100µm
Flow rate 25mL/min
Maximum particle number concentration 10,000 particles/mL (coincidence loss 10%)
Power requirements DC12V (Supplied by KE-40B1)
Dimensions Approx. 125 (H) x 140 (W) x 150 (D) mm
Weight Approx. 2.2kg