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Particle Counters

The particle counter is designed to measure the number of airborne and liquid-borne particles by their size, using the light-scattering methods.

Cleanliness of air, gas and liquid is very important for such industries as semiconductor, LCD, pharmaceutical and foods and the area of biotechnology used for monitoring and maintenance of his cleanliness of air, gas and liquid in above industries and area. And they contribute to increase the reliability of the products, reduce the cost, and improve the environmental conditions.

Their performance and functions supported by Rion's unique and various technology have enjoyed the worldwide reputation.

Control of airborne particles

With the trend towards ever more compact, highly integrated, and high-performance products in the fields of electronics and mechatronics, the problem of contamination by minute particles in the air or in liquids is becoming a major consideration.

For example, during the manufacturing process of a 1-megabyte DRAM LSI chip, a 0.1-micron size particles can critically impair the product, and now, with the focus shifting to 64 and 256 megabyte chips, even particles as small as 0.05 micron can cause unacceptable contamination.

Since particles floating in the air often carry bacteria, particle control is being increasingly necessary i pharmaceutics and foodstuff production as well.

In all of these areas of industry, clean rooms with carefully controlled particle levels are very important. Purity control is seen as vital for maintaining product quality and increasing yield in more and more fields of industry, thus contributing to the advancement of leading-edge technology.

Control of liquid-borne particles

Clean environment control requirements originally were focused mainly on the absence of dust particles in the air. Recently, requirements have been extended to encompass liquids that come into direct contact with the work and liquids used in wet processes, as well as to purity levels that exist in material gases and in the semiconductor manufacturing equipment itself. In the area of pharmaceutics where critical substances are being manufactured, the control of particles in liquid has always been an important consideration.

Aviation and space exploration, heavy machinery, and automobile manufacturing are other fields where particle control in hydraulic systems plays an important role.

Coupled with the impressive progress in electronics, mechatronics, and biotechnology, the quality of water, solvents and other chemicals used for cleaning, diluting, and chemical reactions is an essential consideration.

Even beyond the fields mentioned above, the realization is spreading that precise and reliable purity control is important for maintaining product quality and increasing yield. The emphasis in the industry is shifting from the old "cleaning yes-measurement no" maxim to the new principle "always measure after cleaning."

With high detection efficiency, Rion's laser liquid-borne particle counting system uses highly reliable, long life laser diodes, and technologically superior photo-detector & flow cell. All Rion systems are user friendly, versatile and simple operation for in-situ and batch modes. All system are equipped with standard RS-232-C interface port for computer operation, and are compatible with all liquids from water to strong acids.


Contents

Airborne Particle Counters
Airborne particle counters KC-22A, KC-22B, KC-20, KC-01D1, KC-03A1, KA-80B/KA-82, KM-27


Airborne Paritcle Counter & Sensors for Multi-monitoring system

Particle sensor KA-80B/KA-82
Facility Monitoring Particle Counter KR-02A/KR-02B/KR-02C

Hand-held type Airborne Particle Counter
Hand-held particle counter KR-11A/KR-11B, KR-12A

Optional units for Airborne Paritcle Counter
Printer KP-06, DPU-414
Sensor controller KZ-70
Aerosol Dillution Unit KD-05
Pulse Height Analyzer KH-03
Air Supply Unit KG-02
External Display KX-13/16


Liquid-borne Particle Sensor/Controller/Counter

Particle Sensor KS-40A/40AF, KS-40B/40BF, KS-41, KS-17/17A, KS-16/16F
In-line Particle Sensor KS-71
Controller KE-40/40A
LED sensor KS-65
Particle Counter XP-L4, KL-28 series, KL-11A
WQA-- Water Quality Analyzer KR-32/32A

Optional units for Liquid-born Particle Counters
Printer KP-06
Sensor Controller KZ-70
Pulse Height Analyzer KH-03
Syringe Sampler KZ-30W1/KZ-30W2
External Pressure Sampler KZ-30U/KZ-30MB
Sampler KZ-30M3
Super Bellows Pump K9904
Flow Controller CVR-PVC, CVR1/4-FM
Portable recirculation filtration unit MINIBOY
Chemical solution recirculation filtration unit CHEMIBOY
Concentration-standard fluid CLINTEX


Software for Multi-point monitoring system

Software for Multi-point monitoring system KF-02A
Sensor controller KE-80A
RP Monitor K9461, K9462plus, K0008

Optional units for multi-point monitoring system
Optional units and accessaries

In-line Process Counter Sensor
In-line Process Counter Sensor KS-93

Particle Counter for Injections
Light obscuration Automatic particle counter system KL-04

Portable Oil Diagnostic System
PODS--Portable Oil Diagnostic System KR-60



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