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Liquid-borne Particle Sensor/Controller/Counter

Particle Sensor KS-40A/KS-40AF (KS-40AF supports hydrofluoric acid measurements)
0.1 micron, 10mL/min

KS-40AF写真
Optional unit: Controller KE-40 (upper left)
Syringe sampler KZ-30W1 (right)

  • High-output laser diode and newly developed flow cell for 0.1 micron measurement
  • Repeated measurement function assures precise results also with low sample fluid quantities and short measurement time
  • Compact dimensions, light weight, integrated leak sensor for easy to use
  • KS-40AF employs a monolithic type sapphire cell that supports a wide range of fluid measurement including hydrofluoric acid
(KS-40A and KS-40AF are used in conjunction with the controller KE-40 or KE-40A.)
Specifications
KS-40A KS-40AF
Optical system 90 degree sideway light-scattering method
Light source Laser diode (output: 200mW, wavelength: 830nm)
Sample object Chemical Including HF
Materials of parts exposed to sample fluid Fused silica, PFA Sapphire, PFA
Measurable particle size 0.1 to 2 micron (with PSL particles of refractive index 1.6 in pure water)
Measurement size range Five channels (0.1, 0.15, 0.2, 0.3, 0.5micron or over)
Counting efficiency 70 +/- 15% (measuring PSL particles in the range of 0.3 micron, using count of 0.2 micron and above for comparison with reference unit)
Sample flow rate 10 mL/min
Maximum particle concentration 1200 particles/mL (coincidence loss 5% for 0.1 micron particles)
Sample fluid temperature range +15 to +35C (no moisture condensation on cell)
Allowable sample fluid pressure -100 to +300 kPa (gauge pressure)
Power supply Supplied via controller KE-40 or KE-40A, AC100 to 240V
Dimensions and weight Approx. 245(W) X 139(H) X 179(D) mm (max.), Approx. 4 kg

Particle Sensor KS-40B/KS-40BF(KS-40BF supports hydrofluoric acid measurements)
(KS-40B/KS-40BF is not available in U.S.)
0.2 micron, 10mL/min

KS-40AF写真
Optional unit: Controller KE-40 (upper left)
Syringe sampler KZ-30W1 (right)

  • High-output laser diode and newly developed flow cell for 0.2 micron measurement
  • Measurement for DI-water, solvent, photoresist, acid, and hydrofluoric acid (KS-40BF) possible
  • Repeated measurement function assures precise results also with low sample fluid quantities and short measurement time
  • Compact dimensions, light weight, integrated leak sensor for easy to use
  • KS-40BF employs a monolithic type sapphire cell that supports a wide range of fluid measurement including hydrofluoric acid
(KS-40B and KS-40BF are used in conjunction with the controller KE-40 or KE-40A.)
Specifications
KS-40B KS-40BF
Optical system 90 degree sideway light-scattering method
Light source Laser diode (output: 50mW, wavelength: 780nm)
Sample object Chemical Including HF
Materials of parts exposed to sample fluid Fused silica, PFA, PTFE Sapphire, PFA, PTFE
Measurable particle size 0.2 to 5 micron (with PSL particles of refractive index 1.6 in pure water)
Measurement size range Five channels (0.2, 0.3, 0.5, 1, 2micron or over)
Counting efficiency 70 to 110% (measuring double to triple size of 0.2 micron PSL particles, using count of 0.2 micron and above for comparison with reference unit)
Sample flow rate 10 mL/min
Maximum particle concentration 1200 particles/mL (coincidence loss 5% for 0.2 micron particles)
Sample fluid temperature range +15 to +35C (no moisture condensation on cell)
Allowable sample fluid pressure 300 kPa or less (gauge pressure)
Power supply Supplied via controller KE-40 or KE-40A, AC100 to 240V
Dimensions and weight Approx. 245(W) X 139(H) X 179(D) mm (max.), Approx. 3.5 kg

Particle Sensor KS-41 (Monitoring Photoresist solutions)
0.15 micron, 10 mL/min
KS-41写真
For monitoring of photoresist solutions or SOG used in semiconductor production
  • Detects particles in photoresist as small as 0.15 micron
  • Suitable for batch, on-line, and multi-point monitoring systems
  • Built-in leak detector. Leaks are indicated directly by the sensor without time lag
  • Combination with controller KE-40 and syringe sampler KZ-30W1/30W2 allows configuring a high-precision particle counter system for photoresist

Specifications
Optical system 90 degree sideway light scattering method
Light source Laser diode (output 200mW, wavelength 830nm)
Sample object Acid, alkaline, chemical, pure water excluding hydrofluoric
Materials of parts exposed to sample object Fused silica, PFA
Measurable particle size 0.15 to 2 micron (with PSL particles of refractive index 1.6 in pure water)
Measurement range 0.15, 0.20, 0.30, 0.50 micron and over (4 channels)
Counting efficiency 50+/-10% (measuring PSL particles in the range of 0.3 micron, using count of 0.2 micron and above for comparison with reference unit)
Sample flow rate 10 mL/min (with PSL particles of refractive index 1.6 in pure water)
Max. particle concentration 12,000 particles/ min (coincidence loss 5% for 0.15 micron particles)
Sample fluid temperature range 15 to 30C (no moisture condensation on cell)
Allowable sample fluid pressure 300kPa or less (Gage pressure)
Power supply Power supplied by controller KE-40 or KE-40A, 100 to 240V AC
Dimensions and weight Approx. 300(W) X 160(H) X 250(D) mm (max.), Approx. 7.5 kg

Controller KE-40/40A
Particle sensor operation and measurement data display

Serves for particle sensor operation control and measurement data display. Allows continuous measurement in conjunction with a syringe sampler and printer.
  • For one-on-one control of particle sensor (KE-40)
  • For configuration of multi-point systems with one-on-one control of particle sensors (KE-40A)
Specifications (KE-40)
Particle size channels Max. 6 channels
  • When connecting to KS-40A and KS-40AF: max. 5 channels
  • When connecting to KS-41: max. 4 channels
  • When connecting to KS-17AF: max 2 channels
Measurement time 1 minute, 10 minutes, manual
Measurement modes HOLD: retain measurement value until start of next measurement
REPEAT: automatically restart measurement fare 10-second pause interval
Display
Numeric display: Particle count (max. 6 digits)
OVER: Lights up when unit is operated under interface control
DATA NG: Lights up when problem was detected during measurement
COUNT: Lights up when count exceeds 999,999
REMOTE: Lights up when unit is operated under interface control
Interface Serial interface (standard)
Power supply 100V to240V AC, 50/60Hz, Approx. 80VA
(Supplied power cord should be used only for connection to 100 V AC outlet.)
Dimensions and Weight Approx. 130 (H) X 240 (W) X 70 (D) mm, Approx 2.8kg

In-line Particle Sensor KS-71
(KS-71 is not available in U.S.)
Monitoring slurry for CMP
KL-22写真
  • In semiconductor manufacturing, the trend towards higher capacity devices with ever smaller elements continues at a rapid pace. For finishing products which employ multi-layer wiring and embedded wiring, a technique called chemical mechanical polishing (CMP) is widely used.
  • The KS-71 is designed to monitor slurry used for CMP. It is a liquid-borne particle sensor that can detect particles large enough to cause wafer damage.

Specifications
Optical system Light extinction
Light source Laser diode
Materials of parts exposed to sample fluid Fused silica, PFA
Measurable particle size 2 channels: 3 micron, 5 micron and over
Sample flow rate 60 mL/min
Max. particle concentration 12,000 particles/min
Allowable sample fluid pressure 300kPa or less (Gage pressure)
Power supply Power supplied by external control unit
Dimensions and weight 135 (W) X 97 (H) X 45 (D) mm, Approx. 400 g


Particle Sensor KS-17 (for DI-water)/KS-17A (for chemical)
0.05 micron (KS-17), 0.06 micron (KS-17A), 10 mL/min
KS-17写真
  • 0.06 micron measurement for chemical (KS-17A)
  • Real-time monitoring of particles as small as 0.05 micron
  • Can be directly installed in equipment for on-site process control
  • Counting efficiency largely unaffected by particle size
  • Sensor controller KZ-70 can be used for display, operation control, printout, and other functions
  • Multi-point monitoring system interface allows control from a computer (also in conjunction with KZ-70)
  • Allows configuration of multi-point monitoring system (RP monitor/KF-02A)
Specifications
KS-17 KS-17A
Optical system 90degree sideway light scattering method
Light source Laser diode (wave length: 830nm)
Photo detector 3-channel PIN photo diode
Sample object Ultrapure deionized water Chemical solutions
Materials of parts exposed to sample fluid Fused silica, PFA
Measurement size range 0.05, 0.1 micron and over (2 channels) 0.06, 0.1 micron and over (2 channels)
Flow rate 10 mL/min
Max. particle concentration 100,000particles/mL (coincidence loss 5% or less)
Dimensions and weight 300（W) X 160 (H) X 250 (D) mm (Max), Aprox.6.5 kg
Dimensions and weight (Power supply unit: KZ-50) 71（W) X 112 (H) X 185 (D) mm (Max), Aprox.0.8 kg

Particle Counter XP-L4
0.05 micron sensor, D/A converter, and mass controller integrated in a single unit

In-line Particle Counter for Monitoring DI water
  • Real-time monitoring of particle contamination in DI water
  • Direct installation in DI water line for convenient process monitoring
  • Two size channels: 0.05 micron, 0.1 micron and over
    (Four size channels are available as option: 0.05 micron, 0.1micron, 0.15 micron, 0.2 micron and over)
  • D/A converter built in as standard equipment
  • Optional high-pressure check valve can be installed for high-pressure sample fluids
  • Connection of optional printer DPU-414 possible
Specifications
System configuration Particle Sensor KS-17, Sensor Controller KZ-70, D/A converter XP-10T, Flow controller with flow meter, Purge air unit, and Power supply
Materials of parts exposed to sample fluid Fused silica, PFA (sensor, joints, tubes)
PVC, PTFE, PCTFE, Viton, acrlic (flow controller, flow meter)
Measurement size range 2 ch (standard) 0.05, 0.1micron and over
4 ch (option) 0.05, 0.1, 0.15, 0.2 and over
Flow rate 10 mL/min
Sample fluid temperature range 15 to 30 C
Sample fluid pressure range 100 to 700 kPa (gauge pressure) (with optional high pressure check valve)
D/A Converter
Measurement range 1, 10, 100, 1000 particles/mL
Shift averaging mode Shift average for 10, 60, or 100 measurements is converted to 4-20mA output.
Instantaneous value mode Each measurement is converted to 4-20 mA output
Power requirements 100 V AC, 60 Hz, approx. 100 VA
Dimensions and weight 21 (W) X 250 (H) X 566 (D) mm (without protruding parts), approx. 19 kg

Particle Sensor KS-16/16F　(KS-40AF supports hydrofluoric acid measurements)
0.1 micron, 10 mL/min
KS-16写真
  • Process monitoring at critical system points
  • Integrated use in central chemical supply systems and wet benches
  • Counting efficiency is 65% and higher
  • Deionized water, chemical solution, hydrofluoric (KS-16F) measurements
  • Display, control and printout are possible with KZ-70
  • Direct control by computer (using KZ-70 together is possible)
  • Build up real time monitoring system with the software of RP-monitor or KF-02A
Specifications
KS-16 KS-16F
Optical system 90 degree light-scattering
Light source Laser diode (wave length: 830nm)
Light detector PIN Photo diode
Sample object Water, organic solvent acid alkali solutions including hydrofluoric acid
Materials of parts exposed to sample fluid Fused silica, PFA Sapphire, PFA
Measurement size range 0.1, 0.15, 0.2, 0.3, 0.5micron and over (5 channels)
Flow rate 10 mL/min
Max. particle concentration 1200particles/mL (coincidence loss 5%)
Dimensions and weight 240（W) X 110 (H) X 150 (D) mm (Max), Approx. 3.5 kg
Dimensions and weight (Power supply unit: KZ-50) 71（W) X 112 (H) X 185 (D) mm (Max), Approx.0.8 kg

Particle Sensor KS-65
Measurable particle size: 2 to 100 micron, Flow rate: 25 mL/min

  • Connecting to KL-11 to measure the particles in deionized water, chemical solutions, organic solvent and hydraulic oil.
Specifications
Optical system Light extinction method
Light source Laser diode (output: 5 mW, wavelength: 780nm)
Materials of parts exposed to sample fluid Fused silica, Kalrez, PFA
Measurable particle size range 2 to 100 micron (with PSL particles in pure water)
Sample flow rate 25 mL/min
Max. particle concentration 10,000 particles/mL (coincidence loss of 10% with PSL particles in the vicinity of 2micron particle size)
Power requirements Supplied by particle counter KL-11A
Dimensions and Weight Approx. 60 (W) X 80 (H) X 200 (D) mm (Excluding protruding parts), Approx. 1.5 kg

Particle Counter KL-28 series
(KL-28 series are not available in U.S.)
0.2 micron, 10 mL/min
KL-28シリーズ写真 Compact and Integrated Use for Facility Monitoring System
  • Built up multi-channel monitoring measuring system
  • Extreme compact unit enables to be installed in the supply system or process machine
  • 2-channel type with low price. Available various kind of particle size.
  • Option: RS-485 board (KZ-45MG), 4 to 20 mA output board (KZ-25G), 1 to 5 V output board (KZ-25GI)
  • Can be used with optional software RP monitor

Model Controller Sensor Size Flow rate Parts material Laser diode
Sensor monitor
2 units/set		 KL-28 KE-28 KS-28 0.5, 2.0 10 (and more) Fused silica, PFA 780nm, 2mW
KL-28B KE-28B KS-28B 0.2, 0.5 10 Fused silica, PFA 780nm, 40mW
KL-28BF KE-28B KS-28BF 0.2, 0.5 10 Sapphire, PFA 780nm, 40mW
KL-28(K) KE-28(K) KS-28(K) 2.0, 5.0 10 (and more) Fused silica, PFA 780nm, 2mW
（K) is produced by order. Particle size will be determined later.

Particle Counter KL-11A
6 channels, 0.2 to 400 micron
  • Used with RION's various sensors of light-extinction type (KS-60 series) or light-scattering system (KS-28 series)
  • When the KS-60 series sensor is selected, the flow rate and non-response time are automatically set.
  • Total and single values of all 6 channels are printed in numeric and bar graph.
  • When connected with KZ-30W1 Syringe Sampler, common parameters are automatically set.
  • Controls for KS-28 series sensors
  • Build up the batch system with KZ-30W1Syringe Sampler

Connectable sensors
Size Flow rate
KS-28B/28BF 0.2 to 2.0 micron 10mL/min
KS-28 0.5 to 20 micron 10-100mL/min
KS-65 2 to 100 micron 25mL/min
When connecting the unit to the KS-28, KS-28B, or KS-28BF,
a modification of the particle sensor is required
Specifications
Suitable particle sensor models: KS-65, KS-28 series (modification is required.)
Suitable sampler models Syringe sampler KZ-30W, KZ-30W1, KZ-30W2
Particle size range 6 channels (depending on the connected sensor)
Measurement modes Manual/Automatic measurement, Single, repeated, averaging, periodic, press-time measurement
Alarm output ALARM OUT terminals (shorted by internal relay) and buzzer when particle count reaches preset alarm level
Printer All 6 channels (total/single values), 1 channel only (total value)
Numeric and bar-graph printout
Dimensions 290 (W) X 100 (H) X 405 (D) mm (without protruding parts)
Weight Approx. 7 kg


WQA -- Water Quality Analyzer KR-32/32A

The WQA is the cost effective mobile solution for particle monitoring on filters in water plants, using only on counter for regular, discontinuous measurement of the cleanliness in the raw water and the filtrate.

The WQA analyses samples from bottles, containers or running water, but can also measure directly on pressure lines.
Specifications
Optical system Light extinction
Light source Laser diode
Materials of parts exposed to sample fluid Fused silica, KYNAR
Sample object Particles in water
Flow rate 100 mL/min (KR-32), 50 mL/min (KR-32A)
Particle size ranges 8 ch, 2 to 100 micron (KR-32), 8ch, 1 to 25 micron (KR-32A)
Max. particle concentration 15000 particles/min (KR-32), 25000 particles/min (KR-32A)
(Coincidence loss: 10% or less)
Interface RS-232-C
Printer Integrated thermal graphic printer
Power supply NiMH Battery 4, 5Ah; 3-4 operation; 2.5 h charging
Dimensions and weight 337 (W) X 356 (H) X 210 (D) mm, Approx. 11.5 kg


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