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In-line Process Counter Sensor

Process counter sensor KS-93　(for in-line measurement)
0.1 micron, Rated gas flow rate: 100mL/min
	Direct measuremet of special gas for semiconductor industry Min. measurable particle size: 0.1 micron max. flow rate: 300 mL/min Cleanliness control for total gas system Direct measurement of corrosive and reactive gas as well as inert gas Consists of Particle detection unit and power supply unit Serial interface and multi-point interface are built-in KZ-70 can be connected via multi-point interface, for operation control and display of the results.
Specifications
Optical system 90 degree light-scattering method Light source Laser diode (wavelength 830 nm, output 200 mW) Photo detector PIN photo diode Particle size range 5 channels 0.1, 0.15, 0.2, 0.3, 0.5 micron and over Counting efficiency 45％ +/-10% (When measuring PSL particles with about 0.2 micron diameter in the 0.1 micron range, compared to a reference unit) Rated sample flow 100 mL/min Max flow rate 300 mL/min Max. particle concentration 30 000 particles/min（counting loss 5% for 0.1 micron m particles) Allowable gas pressure 600 kPa or lower Gas flow parts materials Fused silica, SUS316L(EP grinding), Fluorine rubber Allowable gases Gases which will not corrode gas-contacting parts materials Allowable sample gas temperature range 15 to 35C Power supply Via supplied power supply unit KZ-50 (90 to 250 V AC, 50/60 Hz, supplied power cord rated for max. 125 V AC) Power consumption Max. 40 VA (including power supply unit) Dimensions/Weight Main unit: 280 (W) X 135 (H) X 150 (D) mm (excluding protruding parts) Weight: Approx. 6.5 kg Power supply unit: 70 (W) X 111(H) X 184 (D) mm (excluding protruding parts) Weight: Approx. 0.8 kg

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