Particle Counters

Liquid-borne Particle Counters

For measuring batch samples


Particle Sensor、For resist

Ideal for Monitoring 0.15μm Particles in Photoresist, SOG, and Other Solutions

  • Integrated leak sensor with alarm output
  • User selectable channels within measurement range (using KE-40B1 function)


Optical system Light-scattering method
Light source Laser diode (wavelength: 830nm, rated output 200mW)
Materials of parts exposed to sample fluid Synthetic quartz, PFA
Measurement size range 4 channels (Factory default): ≥0.15µm, ≥0.2µm, ≥0.3µm, ≥0.5µm
Setting range 0.15µm to 0.5µm
Flow rate 10mL/min
Maximum particle number concentration 1,200 particles/mL (coincidence loss 5%)
Power requirements DC12V (Supplied by KE-40B1)
Dimensions Approx. 160 (H) x 300 (W) x 251 (D) mm
Weight Approx. 7.5kg