Particle Counters

Liquid-borne Particle Counters

For measuring batch samples


Particle Sensor、For resist

Measures 0.1μm Particles in Photoresist, SOG and other solutions

  • Can be connected to the multiple monitoring system


Optical system Light-scattering method
Light source Diode pumped solid state laser (wavelength: 532nm, rated output 500mW)
Materials of parts exposed to sample fluid Synthetic quartz, PFA
Measurement size range 5 channels (Factory default): ≥0.1µm, ≥0.15µm, ≥0.2µm, ≥0.3µm, ≥0.5µm
Setting range 0.1µm to 0.5µm
Flow rate 5mL/min
Maximum particle number concentration 9,600 particles/mL (coincidence loss 10%)
Power requirements DC12V (Supplied by KE-40B1)
Dimensions Approx. 164 (H) x 464 (W) x 305 (D) mm (excl. protruding parts)
Weight Approx. 12.5kg