For inline measurement
KS-16F
Particle Sensor
Detects partciles down to 0.1μm size
- Process monitoring at critical system points
- Integrated use in central chemical supply systems and wet benches
- Counting efficiency is 60% and higher
- Deionized water, chemical solution, hydrofluoric (KS-16F) measurements
- Display, control and printout are possible with KZ-70
- Direct control by computer (using KZ-70 together is possible)
- Build up real time monitoring system with the software of RP-monitor or KF-03
Specification
| Optical system | Light-scattering method |
|---|---|
| Light source | Laser diode (wavelength: 830nm, rated output 200mW) |
| Materials of parts exposed to sample fluid | Sapphire, PFA |
| Measurement size range | 5 channels: ≥0.1µm, ≥0.15µm, ≥0.2µm, ≥0.3µm, ≥0.5µm |
| Flow rate | 10mL/min |
| Maximum particle number concentration | 1,200 particles/mL (coincidence loss 5%) |
| Power requirements | 100V to 240V AC, Approx. 40VA (including external power requirement KZ-50 (accessory)) |
| Dimensions | Approx. 110 (H) x 240 (W) x 150 (D) mm |
| Weight | Approx. 3.5kg |