CleanroomConditions inside a cleanroom are con-trolled to maintain cleanliness to a spe-cic level by suppressing concentrations of suspended particles and microbes in air, so they are below the criteria. Mate-rials, chemicals, and water supplied to a cleanroom must also maintain the re-quired cleanliness. Environmental con-ditions like temperature, humidity, and pressure are also carefully controlled as needed.KC-52 Handheld Particle CounterThe KC-52 is an airborne particle counter manufactured inside Rion’s cleanroom. It counts 0.3 µm airborne particles to determine the cleanliness of a cleanroom. Equipped with a color LCD panel and a battery, it can be carried anywhere inside the cleanroom to take measurements. It’s widely used for a range of applications in manufacturing processes for electronic components and pharmaceuticals. The KC-52 meets the requirements of ISO 21501-4 (JIS B 9921) standard. (1 µm = 1/1,000 of 1 mm)KS-19F Particle SensorThe KS-19F is a liquid-borne particle counter manufactured inside Rion’s clean-room. In semiconductor manufacturing processes, many types of chemicals are used for cleansing to remove contami-nants, including microparticles. Since the KS-19F can count particles as small as 30 nm, it’s used for contamination control for such chemicals. Equipped with a sap-phire cell in the particle detector unit, the KS-19F can measure the cleanliness of hy-drouoric acid, a representative chemical used in semiconductor manufacturing. (1 nm is 1/1,000 of 1 µm, or 1/1,000,000 of 1 mm.)We’re still operating with consideration for the effects of COVID-19. So, in this episode, we visit our very own cleanroom facility. We’ll dive into the ultimate clean space, not widely known, and introduce to you an environment that supports advanced technologies.Manga by Tama Tsuchiya15
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